Properties of SiC and Si3N4 Thin Films Containing Self-Assembled Gold Nanoparticles

The properties of semiconductor materials can be strongly affected by the addition metallic nanoparticles. Here we investigate SiC + Au and Si3N4 thin films prepared magnetron sputtering deposition followed thermal annealing. influence gold on optical electrical is explored. We show formation self-assembled nanoparticles in Si3N4, with size arrangement determined annealing conditions. Both SiC- Si3N4-based an increase overall absorption increasing content, its decrease temperature. All presence surface plasmon resonance, whose peaks shift toward larger wavelengths nanoparticle size. resistivity significantly drops content for both types matrices, although much higher. incorporated quantity host matrix was chosen such a way to demonstrate that huge range characteristics achievable. are very interesting application opto-electronic devices.